Radiofrequency magnetron sputtering Si-rich silicon oxide Hafnium silicates Photoluminescence Guide d'onde High-k dielectrics Films Al2O3 Rare-earth Rare earth Silicon Oxide materials Rare-earth- doped materials Thin films Microstructure physics Sputtering Couches minces Terres rares Nanostructures Silicon nanocrystals Down-conversion ADE-FDTD Computational electromagnetic methods M-lines Rare-earth ions Structural properties Luminescence Semiconductors Electron paramagnetic resonance Matériaux hybrides Raman scattering Fluorescence XRD Cerium HR STEM-HAADF Oxide interface Conductivity Couches minces semi-conductrices Waveguides Pulvérisation cathodique Pulvérisation magnétron radiofréquence Oxides Raman Phase transition AFM Silicon nanoclusters Liposomes Feature erasure Oxygen vacancies Magnetron sputtering Silicon nitride Resistive Switching Waveguide Erbium RF magnetron sputtering Lifetime Terbium Rare-earth-doped materials Crystal structure Atom probe tomography Rare earths Reactive magnetron sputtering CoMoS Nanostructured materials Cathodoluminescence Doping Neodymium Nanostructuring Thin film Nanoparticles Silicon photonics Citric acid SiC Microstructure physique Quantum-well Friction Refractive index Photovoltaic Hafnium silicate IR spectroscopy FTIR Microstructure Irradiation PZT CO adsorption GENOMIQUE MoS2 Silicium Optical amplifiers Nanostructure Electroluminescence Grazing incidence X-ray diffraction Energy transfer Epitaxy Infrared absorption Si nanocluster Nanoparticules Laser pyrolysis Multilayers Hillocks